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Mass flow controller, Alicat Corporation

Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication.

★ Achieves fast response with the laminar flow method (differential pressure type). ★ Quickly follows flow rate changes. You can obtain the desired flow rate in a short time due to high-speed control response. ★ Flow rate settings can be made not only through front switch operation but also via analog input and RS-232C communication. ★ Standard equipped with mass flow rate 0-5VDC output. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added. ★ A wide range of models is available, from a small 0.5SCCM type to a large 5000SLPM type. ★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation. For more details, please contact us or download the catalog.